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Product name Manufacturer Model Process Inch Vintage Other remarks
EIKO EO-5 DEPOSITION 30㎜□max 2005
ULVAC EBX-1000 DEPOSITION 120mm□
ULVAC EBX8C DEPOSITION 4 1991
ULVAC EBX8C DEPOSITION 4 1991
ULVAC ei-6 DEPOSITION 4 2005
YAMATO V1000X ETCHER 4
PLASMA‐THERM Versaline ICP ETCHER 8
ULVAC CD-300R ETCHER 2~6
ULVAC NA-1300 ETCHER 12 2014
ULVAC NE-7000 ETCHER 4 1996
SEMITOOL SAT ETCHER 4~8
SEMITOOL SST ETCHER 4~8
ULVAC NE-5500 ETCHER 3
SEMITOOL Raider CLEAN
VERSATILE ST270 CLEAN 4

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