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Product name Manufacturer Model Process Inch Vintage Other remarks
AMAT ENDURA DEPOSITION 6 2005
ANELVA C-7730FH DEPOSITION 4 2003
ULVAC CERAUS Z-1000 DEPOSITION 5
ULVAC SIV-200 DEPOSITION 4 2014
ULVAC SIV-500 DEPOSITION 6 2016
ULVAC SRH-420MC DEPOSITION 6
VARIAN V-3290STQ DEPOSITION 5
ULVAC ei-5 DEPOSITION 角基板 2006
ULVAC ei-5 DEPOSITION 角基板 2006
CANON MAS8220 ETCHER 6、8
YAMATO V1000X ETCHER 4
AMAT P-5000 ETCHER 6
TOK TCE7822 ETCHER 8
ULVAC CD-300R ETCHER 2~6
ULVAC NE-950EX ETCHER 4 2014

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