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Solano Box Cleaner
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| Process | CLEAN |
|---|---|
| Manufacturer | RENA |
Cleaning of FOUP`s and FOSB`s
Semi-Automated Cleaner
The Solano is a semi-automatic cleaning system, for your support of contamination control on all common types of FOUP ́s and FOSB ́s. An optimized Hot-DIW spray cleaning system supported by the permanent rotation of the carousel achieves best cleaning results. If desired by adding a surfactants (cleaning detergent), optionally. Drying via an fast centrifugal force power and high quality hot air supplying through an integrated HEPA filter-unit. Regular cleaning enables an efficient reduction of particles and metal contamination outside and inside your products.
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Areas of Application • For cleaning and drying of all current types of FOUP ́s and FOSB ́s |
Features • Front side operation • Swivel arm for inside FOUP cleaning • Optimized turntable and insert-cage • PLC controller with 12” colour touch • Variable data input (temperature, time, speed, parameter, etc.) • HEPA-filtered air inlet from the top • Fan-unit with adjustable speed for standby and process model • Unbalanced sensor control for automatic shut-off |
Benefits • Easy move-in due to modular design • Fast installation, hook-up and start-up • Excellent cleaning & drying performance • Warm air for drying (HEPA-filtered) • One operator can handle multiple systems simultaneausly • Easy to load and unload • Low cost of ownership |
Technical Data Solano
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Process Application |
Cleaning Drying |
| Substrates | FOUP、FOSB |
| Capacity | Turntable with loading capacity of 12 FOUP`s or FOSB`s per run |
| Max. Rotation | 150 rpm |
| Housing Material | PP-white, with stable stainless steel frame |
| Tank Material | PVDF, booster tank for hot Di-water supply |
| Dimensions |
2,000 mm x 1,850 mm x 2,700 mm (length x width x height) Housing in 2 parts, reduced move-in height 2,250 mm |
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Facility requirements |
Electricity 400 VAC, 50-60 Hz, 24 kW, IN 35 A Hot water supply 25 l per minute at 60-70 °C Exhaust 800 m³/h, 500 Pa CDA 6 bar, N2 3 bar, Noise level ~ 65 dbA |
| Options |
Housing according FM4910 Detergence tank with dosing pump, volume approx. 5 liters Humidity sensor for drying Adapter kit for additional parts (cassettes, reticles, etc.) SECS II GEM Interface RFID or barcode reading Second touch panel on the backside for two door system Ionization unit External inline-heater 120 kW
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CONTACT US
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Office phone number
03-6423-0130【Operating hours】 9:00～17:30
*Excluding Saturdays, Sundays, holidays, year-end and New Year holidays, and company holidays. -
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